AN ELLIPSOMETRY DEVICE USING SPECTRAL IMAGING AND ELLIPSOMETRY METHOD THEREOF

摘要

Spectroscopy of the present invention is related to ellipsometric devices and ellipsometry and uses imaging, collimator be suitable for multipoint mode region it is specified/segmentation multipoint mode region sample surface and be grouped it for the incident polarized white light of institute and reflected white-light has because of spectroscopy/image optical grouping and analysis, the feature of one imaging group for being suitable for spectrum includes that the light source of polarized white light is optical analysis to polarised light. Since specific spectrogram group makes a white light be in parallel incident to be suitble to multipoint mode region, pass through the spectroscopy of the wavelength of spectral element, the position to form each point in a multipoint mode region is imaged in the hanchuk of imaging surface, the wanted imaging wavelength positions another hanchuk can obtain the specific light data processing of a star/wavelength with physical characteristic information. Therefore, by the acquisition information in multipoint mode region and physical property simultaneously, a possibility that obtaining data abundant, such as being obtained by spectral wavelength, equally has the effect of improving the speed and reliability of measurement. ;Spectral imaging, ellipsometry, multipoint mode region, wavelength