首页> 外国专利> METHOD FOR THE GENERATION OF A HIGH-FREQUENCY AC VOLTAGE AND CORRESPONDING HIGH-FREQUENCY AMPLIFIER

METHOD FOR THE GENERATION OF A HIGH-FREQUENCY AC VOLTAGE AND CORRESPONDING HIGH-FREQUENCY AMPLIFIER

机译:产生高频交流电压和对应的高频放大器的方法

摘要

The invention relates to a method for the generation of a high-frequency AC voltage and for the operation of a load with said AC voltage. The above is achieved by means of an amplifier working in resonant mode. AC voltage energy has application, for example, in plasma processes, gas discharge processes for thin-film coating, etching or for laser stimulation. The above thus concerns loads the load resistance of which can vary enormously. Amongst other things the varying load resistances can cause undesired modulations in the base frequency. In order to avoid the above, one or more parasitic resonant circuits with a resonance frequency below that of the base frequency, which form with varying operational conditions, each with differing load and/or differing supply voltage and/or differing output power, are damped to the point where resonance does not occur.
机译:本发明涉及一种用于产生高频AC电压并且用于利用所述AC电压操作负载的方法。以上是通过以谐振模式工作的放大器来实现的。交流电压能量已应用于例如等离子体工艺,气体放电工艺中以进行薄膜涂覆,蚀刻或激光激励。因此,以上涉及的负载的负载电阻可以极大地变化。除其他事项外,变化的负载电阻会导致基频产生不希望的调制。为了避免上述情况,对一个或多个寄生谐振电路进行衰减,这些寄生谐振电路的谐振频率低于基频,该寄生谐振电路是在不同的工作条件下形成的,每个工作条件下负载和/或电源电压和/或输出功率均不同到不发生共振的地步。

著录项

  • 公开/公告号KR20050086460A

    专利类型

  • 公开/公告日2005-08-30

    原文格式PDF

  • 申请/专利权人 HUTTINGER ELEKTRONIK GMBH + CO. KG;

    申请/专利号KR20057008256

  • 发明设计人 ZIEGLER JOACHIM;

    申请日2005-05-09

  • 分类号H03F3/217;H03F1/08;H03F3/19;

  • 国家 KR

  • 入库时间 2022-08-21 22:04:39

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号