the micro valve for nano fluid using SMA film and the reference electrode for pH sensor using the micro valve structure

摘要

PURPOSE: A micro valve for controlling a nano flow rate and a pH sensor reference electrode by using the same are provided to improve detecting characteristics of the pH sensor reference electrode by using a shape memory alloy thin film. CONSTITUTION: A micro valve(26) includes a silicon wafer(24), an insulation layer(13), DLC layers(14,14'), a chamber(18), carbon nano tubes(16,16'), an SMA thin film(17), and electrodes(19,19'). The silicon wafer(24) has a cavity section(11) which is opened towards an opening of a reference electrode(30). The insulation layer(13) is formed on the silicon wafer(24) and has a perforated slot having a predetermined length and a width. The chamber(18) is surrounded by the insulation layer(13) and the DLC layers(14,14'). The SMA layer(17) receives electric energy from the electrodes(19,19').