MICRO FLUID DEVICE EQUIPPED WITH A MICRO VALVE CAPABLE OF PREVENTING THE STICK OF AN ELASTIC FILM AND A VALVE SHEET BY FORMING A MICRO STRUCTURE ON THE SURFACE OF THE ELASTIC FILM

摘要

PURPOSE: A micro fluid device equipped with a micro valve is provided to secure the reliability and the re-producibility of the operation of the micro valve and to reduce a cost required for manufacturing the micro fluid device.;CONSTITUTION: A micro fluid device includes substrates(11, 12), an elastic film(13), a micro channel(16), a valve sheet(18), a hollow space(19), and a micro pattern. The substrates face to each other. The elastic film is arranged between the substrates. The micro channel is formed on the surface of a second substrate facing the first substrate. The valve sheet is protruded in the micro channel of the second substrate. The hollow space is arranged to a position of the first substrate corresponding to the valve sheet.;COPYRIGHT KIPO 2012