Illumination system with a vibrating diffuser, e.g. for use in microlithography projection illumination systems, whereby vibration of the diffuser induced in any of a number of ways

摘要

Illumination system has a diffuser element (2) that is placed in an illumination beam path (1) so that it can be moved in a vibrating manner. Vibration of the diffuser can be induced electromechanically, via gas pressure generating means, using impulse transfer means or electrostatic, magnetic and or electrodynamic vibration means.