Semiconductor arrangement comprises a substrate with integrated electronic switching elements, layer stacks arranged over the substrate, and a dummy structure arranged in two layer stacks for mechanically stabilizing the stacks

摘要

Semiconductor arrangement comprises a substrate with integrated electronic switching elements, layer stacks arranged over the substrate, and a dummy structure arranged in two layer stacks for mechanically stabilizing the stacks. A part of the layer stacks has a dielectric layer containing metal structures. An independent claim is also included for a process for the production of the semiconductor arrangement.