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A micro/nano region thin film tensile test planarity measurement procedure observes three dimensional movement of marker atoms using scanning tunnelling microscopy
A micro/nano region thin film tensile test planarity measurement procedure observes three dimensional movement of marker atoms using scanning tunnelling microscopy
A micro/nano region thin film (1) planarity measurement procedure applies a marker substance and observes the three dimensional movement of the marker atoms using scanning tunnelling microscopy (2). Independent claims are included for equipment using the procedure.
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