METHOD AND DEVICE FOR INSPECTING LAND PATTERN

摘要

PPROBLEM TO BE SOLVED: To provide a land pattern inspection method and inspection device capable of detecting a minute defect of a land which can not be detected by a method for measuring diameters of a through hole with a radial length measuring instrument. PSOLUTION: A controller 21 reads out the coordinates of the land on a printed board to be an object of inspection and a master image of the land from a land coordinate file 30. Next, an image of the land at the read-out land coordinates is picked up, and a binarized land image is formed. Moreover, coordinates of a land portion in the land image are extracted, and are stored in a file 31 of 1-pixel part coordinates. Next, a predetermined circle image is read out from a table 29 of hole-plugging circle patterns, and contraction processing is applied to the circle image only a predetermined number of times. On this occasion, if the coordinates of a pixel to be an observing point correspond to the coordinates of the land portion, contraction processing is not applied with respect to the observing point. Existence of minute defects in the land is inspected by comparing the circle image after the contraction with the master image. PCOPYRIGHT: (C)2007,JPO&INPIT