BORON-DOPED DIAMOND FILM, AND DIAMOND-COATED CUTTING TOOL

摘要

PROBLEM TO BE SOLVED: To improve oxidation resistance and lubricity of a diamond film.;SOLUTION: Since boron is doped in a boron-doped diamond film 20, a layer of boron oxide (such as B₂O₃) is deposited on the surface of the diamond film 20 when subjected to oxidation. Progress of oxidation inside the film is suppressed by the layer of the oxide, the oxidation resistance of the film 20 is improved, and the friction coefficient is reduced to improve the lubricity. In particular, the diamond film 20 of the present embodiment forms a multi-layered structure in which low-doping layers 22 and high-doping layers 24 are alternately laminated on each other. Further, the highest layer is constituted of the high-doping layer 24, the oxidation resistance and the lubricity by the boron oxide can be improved while maintaining the wear resistance or the like which is the original characteristic of the diamond film.;COPYRIGHT: (C)2006,JPO&NCIPI