PREDICTIVE MAINTENANCE DEVICE FOR MANUFACTURING DEVICE, AND COMPUTER PROGRAM FOR PREDICTIVE MAINTENANCE OF MANUFACTURING DEVICE

摘要

PPROBLEM TO BE SOLVED: To prevent the occurrence of defectives by predicting future quality characteristic values to recognize abnormality and adjusting errors of a device. PSOLUTION: Past measurement data are registered, and a combination of an actually predicted quality characteristic value and a state characteristic value estimated to be correlative to the quality characteristic value is selected from the registered characteristic values. The selected measurement data are given to a plurality of prediction models to determine the optimum prediction model out of these prediction models, and information corresponding to the accuracy of prediction is presented. The past measurement data and sequentially updated present measurement data are given to the optimum prediction model to predict the future quality characteristic value. PCOPYRIGHT: (C)2006,JPO&NCIPI