PASSIVE ELEMENT, PASSIVE DEVICE, IC (INTEGRATED CIRCUIT) CHIP, OSCILLATOR, AND MANUFACTURING METHOD OF ALL

摘要

PROBLEM TO BE SOLVED: To provide a passive element capable of taking the effective area S_E of an electrode so as to be larger than before, an IC chip as well as an oscillator equipped with the passive element, and the manufacturing method thereof.;SOLUTION: In the passive element 1 equipped with a wafer 2, a lower electrode 4 formed on the wafer 2 through a first insulating film 3, a capacity film 5 formed on the lower electrode 4, and an upper electrode 6 formed on the capacity film 5; the configuration of the lower electrode 6, the same of the capacity film 5 and the same of the upper electrode 6 are hexagonal.;COPYRIGHT: (C)2006,JPO&NCIPI