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DISK SUCTION CONVEYANCE METHOD OF MAGNETIC TRANSFER DEVICE, AND MAGNETIC TRANSFER DEVICE
DISK SUCTION CONVEYANCE METHOD OF MAGNETIC TRANSFER DEVICE, AND MAGNETIC TRANSFER DEVICE
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机译:磁转移装置的盘吸对流方法及磁转移装置
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摘要
PROBLEM TO BE SOLVED: To provide a disk suction conveyance method in which a slave disk (transferred disk) can be sucked always in parallel to a sucking surface of a suction chuck and a disk surface is never flawed.;SOLUTION: Disclosed is a magnetic transfer device 10 which magnetically transfers a magnetic pattern of a master disk 46 held by a holder unit 22 to the slave disk 40. The posture of the slave disk 40 is corrected by a correcting means 43 so that a disk surface 40A of the slave disk 40 stored in a disk supply cassette 38 is in parallel to the sucking surface 42f of the suction chuck 42b right before suction, the posture-corrected slave disk 40 is sucked by the suction chuck 42b, and the correcting means 43 is retracted from the sucked slave disk 40 to suctionally carry the slave disk 40 by the holder unit 22.;COPYRIGHT: (C)2006,JPO&NCIPI
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