OPTICAL MEASURING INSTRUMENT, OPTICAL MEASURING DEVICE, AND OPTICAL MEASURING SYSTEM

摘要

PROBLEM TO BE SOLVED: To improve durability by simplifying constitution.;SOLUTION: A NC processing machine 1 controls to move a processing table 2 in an X direction and a Y axis direction and controls to move a main shaft head 6 in a Z axis direction when processing an object 4 to be measured by an NC controller 9, and moves the processing table 2 by the same control as that during processing when measuring the object 4 to be measured. An optical measuring instrument 18 detects measuring light from the object 4 to measured by an optical detection element by being synchronized to an X coordinate value and a Y coordinate value of the processing table 2 changed by movement control of the NC controller 9. A control part of an optical measuring device calculates the shape of the object 4 to be measured on the basis of measuring light detected with the optical detection element.;COPYRIGHT: (C)2007,JPO&INPIT