MICRO-ELECTROMECHANICAL SYSTEM (MEMS) VARIABLE CAPACITOR (MICRO-ELECTROMECHANICAL VARACTOR OF ELASTOMERIC CMOS BASE)

摘要

PROBLEM TO BE SOLVED: To provide a micro-electromechanical system (MEMS) variable capacitor where movable comb type drive electrodes with opposite polarities are simultaneously manufactured on the same substrate, which operate independently.;SOLUTION: These electrodes are formed as an interdigital structure so as to maximize electrical capacitance. To assure that a varactor does not fail as the result of stress that possibly separates a dielectric material from a conductive element, this MEMS variable capacitor contains a CMOS manufacturing step combined with an elastomeric material selectively used in a region where stress is maximum. Combining this CMOS process and a conductive elastomeric material between vias increases an overall sidewall region, thus increasing electrical capacitance density.;COPYRIGHT: (C)2006,JPO&NCIPI