METHOD AND APPARATUS FOR PRODUCING HIGH PURITY SILICA POWDER AND HIGH PURITY SILICA POWDER

摘要

PROBLEM TO BE SOLVED: To provide a method and an apparatus for producing high purity silica powder capable of easily producing high purity and easily handleable silica powder by producing a porous quartz glass body and, at the same time, disposing of exhaust gas generated, and to provide high purity silica powder.;SOLUTION: This production method is one for producing the porous quartz glass body by depositing glass particulates produced by vapor phase hydrolysis reaction of quartz-based glass raw materials, and simultaneously producing the high purity silica powder, where the exhaust gas containing silica powder is led to a separator equipped with a ceramic filter, and treating the separated/recovered silica powder by a deaeration apparatus to make its bulk density to 0.1-0.7 g/cm³.;COPYRIGHT: (C)2006,JPO&NCIPI