METHOD AND APPARATUS FOR PRODUCING HIGH PURITY SILICA POWDER, AND HIGH PURITY SILICA POWDER

摘要

A method for producing a high purity silica product, wherein a step of forming glass particles by the gas phase hydrolysis of a quartz-based glass material, a step of depositing glass particles to prepare a porous quartz glass material and a step of recovering a part of glass particles as a silica powder are involved, which comprises a step of introducing an exhaust gas containing glass particles being discharged from the step of preparing a porous quartz glass material to a separation device having a ceramic filter, a step of separating and recovering the above glass particles as a silica powder by the ceramic filter, and a step of converting the recovered silica powder to a powder having a bulk density of 0.1 to 0.7 g/cm3 by the use of a degassing device.