SYSTEM AND METHOD FOR THERMAL STRESS CUTTING OF BRITTLE MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide a simple and inexpensive system for the thermal stress cutting of a brittle material, which can realize a high-grade and high-speed cut-off, etc., of the margin of a workpiece.;SOLUTION: The thermal stress cutting system is equipped with a workpiece holding mechanism that holds a workpiece and a processing part unit that performs the thermal stress cutting of the workpiece by locally heating the workpiece by irradiation with a laser beam to effect its thermal stress cutting, wherein the workpiece hold mechanism and the processing part unit can move relatively to each other so that a region of the workpiece which is locally heated by the processing part unit may move along a predetermined cutting line of the workpiece, and the workpiece hold mechanism has a scrap clamper that clamps the margin of the workpiece and a height holder that is situated on the side spaced from the scrap clamper and supports the lower surface of the workpiece, wherein at least that part of the scrap clamper which abuts against the workpiece is made from a relatively highly rigid elastic material, and the height holder is made from a low-friction material that allows the workpiece to horizontally move during the thermal stress cutting.;COPYRIGHT: (C)2006,JPO&NCIPI