PATTERNING METHOD, ELECTRO-OPTICAL DEVICE, MANUFACTURING METHOD THEREOF, SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF, PIEZOELECTRIC DRIVING ELEMENT AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a patterning method, a manufacturing method of an electro-optical device and the device, a manufacturing method of a semiconductor device and the device, and a manufacturing method of a piezoelectric driving element and the element, capable of improving productivity without degrading machining accuracy.;SOLUTION: A transparent conductive film 42 made of ITO is formed on the entire upper surface of a second interlayer insulation film 37 having via holes 39, and a metallic film 45 reacting with a hydrochloric acid L for generating hydrogen gas P is formed in an etching region E of the conductive film 42 by applying zinc paste. The transparent conductive film 42 is etched by soaking an element forming surface 14a having the metallic film 45 in the hydrochloric acid L to form an anode 40.;COPYRIGHT: (C)2006,JPO&NCIPI