ETCHING LIQUID, REFILLING LIQUID, AND FORMING METHOD OF CONDUCTOR PATTERN USING IT

摘要

PPROBLEM TO BE SOLVED: To provide an etching liquid and refilling liquid which can promptly etch at least one metal chosen from Ni, Cr, Ni-Cr alloy, and Pd, and a forming method of conductor pattern using it. PSOLUTION: The etching liquid or a solution of water, which contains at least one component chosen from NO, NSB2/SBO, NOSB2/SB, NSB2/SBOSB3/SBand these ions, and an acid component, etches at least one metal chosen from Ni, Cr, Ni-Cr ally and Pd. The forming method of a conductor pattern (1) forms the conductor pattern (1) by etching at least one metal chosen from Ni, Cr, Ni-Cr alloy and Pd with the liquid. PCOPYRIGHT: (C)2006,JPO&NCIPI