RADIATION INCIDENT POSITION DETECTOR, AND RADIATION INCIDENT POSITION DETECTING METHOD

摘要

PROBLEM TO BE SOLVED: To easily and precisely identify an incident position, in a radiation incident position detector using a radiation detecting element.;SOLUTION: This radiation incident position detector has a semiconductor detecting element (the radiation detecting element) 4 arranged opposedly to a specimen 3, a preamplifier group 5 connected to a plurality of resistance wires arranged on a semiconductor detecting element 4 surface (detection face), the first signal-arithmetic-processing part 6 for identifying a position on the detection face through charge division in the resistance wires, the second signal-arithmetic-processing part 7 for identifying a position along a direction perpendicular to the detection face, and an incident position computing part 8 for calculating the radiation incident position in the detection face, based on the the first signal-arithmetic-processing part 6 and the second signal-arithmetic-processing part 7.;COPYRIGHT: (C)2006,JPO&NCIPI