Method for measuring reflectivity of sample surface, involves receiving reflected radiation by two-dimensional segmented detector, adjusting angle position of sample surface, and scanning sample surface by incident beam

摘要

The method involves receiving a reflected radiation (190) by a two-dimensional segmented detector (120). Angle position (130, 140) of a sample surface (110) is adjusted. The sample surface is scanned by an incident beam (180). Spaced dots of the sample surface are provided on the detector. An independent claim is also included for a device for measuring reflectivity of a sample surface.