RAW MATERIAL COMPOSITION DETERMINING METHOD FOR MANUFACTURE OF FERRODIELECTRIC SINGLE CRYSTAL, CHEMICAL COMPOSITION RATIO COMPARING METHOD OF FERRODIELECTRIC SINGLE CRYSTAL, AND DESIGN PARAMETER DETERMINING METHOD OF SURFACE ACOUSTIC WAVE DEVICE

摘要

PPROBLEM TO BE SOLVED: To find a correct chemical composition ratio of nurturing crystal and to provide high precision SAW device design parameter. PSOLUTION: The absolute relationship with LSAW velocity in the composition is obtained by determining propagating direction of LSAW sensitive to chemical composition ratio variation for the crystal of the composition near the congruent composition, and also by determining composition for making zero the distribution in the nurturing axis direction through LSAW velocity distribution measurement in the nurturing axis direction of each crystal in the propagating direction thereof. Consequently, mass-production of crystal with extremely small distribution of composition is realized, and absolute index having reliability in evaluation of crystal chemical composition is provided. Moreover, the SAW device design parameter with higher accuracy is determined using the acoustic physical constant corresponding to the chemical composition ratio of the nurturing crystal by finding a correct relationship of the acoustic physical constant regarding the chemical composition ratio. PCOPYRIGHT: (C)2006,JPO&NCIPI