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Method of determining the solid-liquid interface height between single crystal and raw material melt and method of manufacturing single crystal
Method of determining the solid-liquid interface height between single crystal and raw material melt and method of manufacturing single crystal
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机译:确定单晶与原料熔体之间的固液界面高度的方法和制造单晶的方法
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摘要
PROBLEM TO BE SOLVED: To provide a method capable of preventing the influence of the extension of a wire on a calculation result when determining a solid-liquid interface shape between a single crystal and a raw material melt.SOLUTION: The method for calculating a solid-liquid interface height between a single crystal and a raw material melt when growing the single crystal comprises the steps of: measuring the measurement weight of the single crystal using crystal weight detecting means during pulling the single crystal; calculating the calculation weight of the single crystal from the crystal length and crystal diameter of the single crystal during or after pulling the single crystal; and calculating the solid-liquid interface height on the basis of a difference between the measurement weight and the calculation weight. In the step of calculating the calculation weight, a crystal length calculated by correcting the extension of a wire in the length of the single crystal calculated from the rotation angle of a wire drum or a crystal length measured using means for directly measuring a position of a seed crystal is used as the crystal length of the single crystal.SELECTED DRAWING: Figure 1
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