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Current and thermal diffusion transparent layers for surface emitting lasers.

机译:用于表面发射激光器的电流和热扩散透明层。

摘要

A surface-emitting laser includes optically transparent layers on a side of a DBR mirror structure (24; 44; 74) that is opposite to an optical cavity of the laser. In one embodiment, the transparent layer is a heat-conducting layer (34) that has an efficient heat transfer relationship with an opening in a top electrode (30) and with a heat-spreading layer (36). The heat-spreading layer increases the diameter of the electrode, so as to reduce the thermal impedance of the surface-emitting laser. The heat-spreading layer may be annular in shape and may have an inside diameter (38) that is less than the outside diameter of the electrode, allowing the heat-spreading layer to first overlap the electrode and then overlap the portion of the heat-conducting layer that resides on the inside portion of the electrode. In another embodiment, the optically transparent layer is positioned between the top electrode (46; 76) and the top DBR mirror structure (44; 74) of the surface-emitting laser. In this embodiment, the transparent layer is a current-spreading layer (42; 64; 68) that reduces the lateral resistance of the laser. Lateral resistance is reduced by providing a layer having a thickness of one-half of the wavelength of the light energy generated in the laser times an odd multiple greater than one. Optionally, two half-wavelength layers (64 and 66) may be formed between the electrode and the mirror structure, with the upper layer (66) being selected primarily for its electrical properties and the lower layer (64) being selected primarily for its optical properties. IMAGE
机译:表面发射激光器在DBR镜结构(24; 44; 74)的与激光器的光学腔相反的一侧上包括光学透明层。在一个实施例中,透明层是导热层(34),其与顶部电极(30)中的开口和散热层(36)具有有效的热传递关系。散热层增加了电极的直径,从而减小了表面发射激光器的热阻。散热层可以是环形的,并且其内径(38)小于电极的外径,从而允许散热层首先与电极重叠,然后与热电极的一部分重叠。驻留在电极内部的导电层。在另一个实施例中,光学透明层位于表面发射激光器的顶部电极(46; 76)和顶部DBR镜结构(44; 74)之间。在该实施例中,透明层是减小激光器的侧向电阻的电流扩展层(42; 64; 68)。通过提供厚度为激光器产生的光能波长的一半的层数乘以大于一的奇数倍的层,可以减小横向电阻。可选地,可以在电极和反射镜结构之间形成两个半波长层(64和66),其中主要出于其电特性而选择上层(66),并且主要出于其光学特性而选择下层(64)。属性。 <图像>

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