Thin film deposition methods and thin film deposition for molecular beam source cell

摘要

PROBLEM TO BE SOLVED: To uniformly deposit an organic electroluminescence material on a substrate with a large area, and at the same time, to prevent the occurrence of defects of a film caused by a spitting phenomenon.;SOLUTION: A plurality of molecule emission ports 4, 4a, 4b, and 4c, which emit molecules of film forming materials a, b, and c evaporated from crucibles 5, 5a, 5b, and 5c toward the surface of a solid on which the film is formed are provided by arranging in one row or in a plurality of rows. Also, the molecular of the film forming materials a, b, and c generated at the crucibles 5, 5a, 5b, and 5c are emitted toward the surface of the solid from the molecule emission ports 4, 4a, 4b, and 4c through buffer chambers 9, 10, 9a, 10a, 9b, 10b, 9c, and 10c by providing the buffer chambers 9, 10, 9a, 10a, 9b, 10b, 9c, and 10c between the crucibles 5, 5a, 5b, and 5c and the molecule emission ports 4, 4a, 4b, and 4c.;COPYRIGHT: (C)2004,JPO