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Sputter ion pump and manufacturing method therefor and image display device with sputter ion pump
Sputter ion pump and manufacturing method therefor and image display device with sputter ion pump
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机译:溅射离子泵及其制造方法和具有溅射离子泵的图像显示装置
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摘要
A sputter ion pump comprises a metal pump container. In the pump container are arranged a cathode and an anode opposed to each other in the pump container and a permanent magnet situated between the cathode and the inner surface of the pump container. After locating the anode, cathode, and magnetic material in the pump container, the magnetic material is magnetized from outside the pump container, thereby forming the permanent magnet.
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