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Tribo-chronoamperometry as a tool for CMP application
Tribo-chronoamperometry as a tool for CMP application
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机译:摩擦计时电流法作为CMP应用的工具
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摘要
The invention provides a method of determining at least one electrochemical characteristic of a chemical-mechanical or electrochemical-mechanical polishing system comprising application of a potential between a polishing substrate and an electrode to generate a current, and determining the at least one electrochemical characteristic by analysis of the current as a function of time.
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