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ALD ZnO seed layer for deposition of ZnO nanostructures on a silicon substrate
ALD ZnO seed layer for deposition of ZnO nanostructures on a silicon substrate
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机译:用于在硅衬底上沉积ZnO纳米结构的ALD ZnO种子层
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摘要
Zinc-oxide nanostructures are grown without using a metal catalyst by forming a seed layer of polycrystalline zinc oxide on a surface of a substrate. The seed layer can be formed by an atomic layer deposition technique. Growth of at least one zinc-oxide nanostructure is induced on the seed layer. The seed layer can alternatively be formed by using a spin-on technique, such as a metal organic deposition technique, a spray pyrolisis technique, an RF sputtering technique or by oxidation of the seed layer.
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