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Semiconductor Device with Spacer Having Batch and Non-Batch Layers
Semiconductor Device with Spacer Having Batch and Non-Batch Layers
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机译:具有间隔层的半导体器件,该间隔层具有批层和非批层
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摘要
A semiconductor device including a gate stack located over a substrate and a spacer located over the substrate and adjacent the gate stack. The spacer includes a plurality of layers, wherein at least one of the plurality of layers is a batch layer and at least one of the plurality of layers is a non-batch layer.
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