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Method for characterization of the illuminator in a lithographic system
Method for characterization of the illuminator in a lithographic system
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机译:在光刻系统中表征照明器的方法
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摘要
Pupil intensity distribution of an imaging system is measured by exposing an image field of a radiation detector with a bright feature, positioning the detector at a distance away from the image plane, and exposing the image field of the detector with a bright feature, resulting in a cumulative exposure of the image field of the detector from the two exposures. A characteristic of a spatial pattern in the cumulative exposure of the image field of the detector is then determined.
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