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Method of manufacturing mask for exposure, mask for exposure, and package body of mask for exposure
Method of manufacturing mask for exposure, mask for exposure, and package body of mask for exposure
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机译:曝光用掩模的制造方法,曝光用掩模以及曝光用掩模的包装体
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摘要
There are provided a method of manufacturing a mask for exposure, which includes the step of patterning a light-shielding film formed on a quartz substrate to form a light-shielding pattern, and the step of directly measuring a step from the surface of the quartz substrate to the top surface of the light-shielding pattern to obtain the actual measurement value of the step.
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