Electrostatic actuator and liquid droplet ejecting head having stable operation characteristics against environmental changes

摘要

A liquid droplet ejecting head includes: one or more nozzle holes ejecting liquid droplets; one or more pressure liquid chambers communicating with the nozzle holes and containing liquid to be ejected; a common liquid chamber communicating with the pressure liquid chambers; one or more diaphragms each forming a wall face of the corresponding pressure liquid chamber; one or more vibration chambers containing air gaps provided in contact with the diaphragms on the opposite side from the pressure liquid chambers; and one or more electrodes provided to oppose the diaphragms through the air gaps. The liquid droplet ejecting head further includes: a deformable plate whose deformation is greater than the total deformation of the diaphragms, the deformable plate forming a wall face of the common liquid chamber, and a pressure correcting chamber provided across the deformable plate from the common liquid chamber so as to communicate with the vibration chambers.