HIGH FILTERING EFFICIENCY, LOW ENERGY CONSUMPTION, AND LOW NOISE FAN FILTER UNIT

摘要

A FAN FILTER UNIT (10) FOR CLEAN ROOMS HAS BAFFLE STRUCTURES (48,52) SIZED AND PLACED TO LIMIT THE PATHS OF ENTRY OF AIR FLOW FROM THE UNIT MOTORIZED FAN (24) TO THE OUTLET PORTS (34,36),THE BAFFLE STRUCTURES (48,52) EXTENDING FOR A VERTICAL HEIGHT SUFFICIENT TO AVOID REVERSAL OF AIR FLOW WITHIN THE ENCLOSURE (12) FOR LOWER ENERGY REQUIREMENTS IN THE UNIT WHILE CONTROLLING NOISE LEVELS AND KEEPING BTU OUTPUT LOW.(FIG 1)