DISTRIBUTED-MASS MICROMACHINED GYROSCOPES OPERATED WITH DRIVE-MODE BANDWIDTH ENHANCEMENT

摘要

A micromachined z-axis rate gyroscope with multidirectional drive- ode has an increased drive-mode bandwidth for relaxing mode-matching requirement n which the drive and sense modes are completely decoupled. By utilizing multiple drive-mode oscillators with incrementally spaced resonance frequencies, wide-bandwidth response is achieved in the drive-mode, leading to reduced sensitivity to structural a d thermal parameter fluctuations. Quadrature error and zero-rate-output are also min mized, due to the enhanced decoupling of multi-directional linear drive-mode and the torsional sense-mode. Bulk-micromachined prototypes have been fabricated in a on;--mask S01­based process, and is experimentally characterized.