METHOD OF FABRICATING A FREE-STANDING MICROSTRUCTURE

摘要

Provided is a MEMS device 800 comprising an integrated post and deformable layer 870. In some embodiments, the transition between the post and deformable layer comprises substantially a single arcuate or convex surface, thereby providing a mechanically robust structure. Some embodiments provide a method for fabricating a MEMS device comprising the use of a self-planarizing sacrificial material, which provides a surface conducive to the formation of a relatively uniform deformable layer thereon.