NEW AMINE SURFACTANTS FOR USE IN CARBON DIOXIDE, METHOD FOR PREPARATION THEREOF AND METHOD FOR IMPROVING THE EFFICIENCY OF CLEANING OF CARBON DIOXIDE FLUID ON THE VARIOUS MICROELECTRONIC STRUCTURES

摘要

The present invention relates to amine-based surface active agent and a method capable of applying the new type of environmentally friendly carbon dioxide. An amine of the novel amine surfactants described above is characterized in that the retention of the hydrophilic substituted with a linear or branched hydrocarbon residue of a low molecular weight, acetyl or pro-dioxide sex (CO ₂ philic) represents the ionized nitrogen and possibly at the same time origin. It may also be derivatized with various acid form, a halogen flame type, betaine type or amine oxide type to impart further hydrophilicity. Such a surface active agent of the invention is cheap and, not limited to the biological the property to absorb water good to, various types of substrates used with the liquid or supercritical carbon dioxide, for example a semiconductor substrate, a micro-mechanism composite devices (MEMs), a display such as from the panel or opto-electronic device (optoelectronic device) is effective to remove contaminants such as water, a water-soluble solvent (developer) and an ionic by-product. Accordingly, the present invention relates to novel amines useful in the present invention for removing contamination of various electronic substrate using a carbon dioxide fluid provides the use of a surface active agent.