Bulk Acoustic Wave Resonator's manufacturing method thereof using Polyvinylidene fluoride

摘要

PURPOSE: A bulk acoustic wave resonator with polyvinylidene fluoride and a manufacturing method thereof are provided to simplify manufacturing process and product structure by attaching a polyvinylidene fluoride layer on a support layer. CONSTITUTION: A bulk acoustic wave resonator includes a support layer, a ,polyvinylidene fluoride, upper and lower electrodes, and a gold wire. The support layer(6) is vaporized on a silicon substrate(2). An air gap is formed on the support layer. Upper and lower polyvinylidene fluorides(84) are attached on the support layer. Upper and lower electrodes(820,840) are attached to upper and lower surfaces of the upper and lower polyvinylidene fluoride, respectively. The gold wire(10) is attached on the upper and lower electrodes.