首页>
外国专利>
BULK ACOUSTIC WAVE RESONATOR WITH POLYVINYLIDENE FLUORIDE ATTACHED ON SUPPORT LAYER AND SIMPLIFIED MANUFACTURING METHOD THEREOF
BULK ACOUSTIC WAVE RESONATOR WITH POLYVINYLIDENE FLUORIDE ATTACHED ON SUPPORT LAYER AND SIMPLIFIED MANUFACTURING METHOD THEREOF
展开▼
机译:附有聚偏二氟乙烯的体声波谐振器及其简化制造方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
PURPOSE: A bulk acoustic wave resonator with polyvinylidene fluoride and a manufacturing method thereof are provided to simplify manufacturing process and product structure by attaching a polyvinylidene fluoride layer on a support layer. CONSTITUTION: A bulk acoustic wave resonator includes a support layer, a ,polyvinylidene fluoride, upper and lower electrodes, and a gold wire. The support layer(6) is vaporized on a silicon substrate(2). An air gap is formed on the support layer. Upper and lower polyvinylidene fluorides(84) are attached on the support layer. Upper and lower electrodes(820,840) are attached to upper and lower surfaces of the upper and lower polyvinylidene fluoride, respectively. The gold wire(10) is attached on the upper and lower electrodes.
展开▼