SEALING STRUCTURE OF A MALE AND FEMALE COUPLINGS IN AN AUTOMATIC CONNECTING DEVICE OF A HOSE FOR TRANSFERING A HIGH PURITY CHEMICALS

摘要

This invention relates to automatic connection of a hose for the chemical feed device for use in a semiconductor manufacturing process , the prior through the use of the ohringreul to the receiving portion of the valve sealing body or arm can be coupled to the coupling were the seal , which has problems such as leakage due to problems, such as O-rings are separated . ; this invention is formed by a plurality of circumferentially confidentiality by configuring the flexible wall to forming the plurality of grooves along a circumferential direction on the receiving portion of the valve body or be coupled to the coupling arm in order to solve this problem , the term Tan has to want to keep the feature is confined by the walls of a multiple .