SEALING STRUCTURE OF A MALE AND FEMALE COUPLINGS IN AN AUTOMATIC CONNECTING DEVICE OF A HOSE FOR TRANSFERING A HIGH PURITY CHEMICALS

摘要

the present invention is used in semiconductor manufacturing processes of chemical transfer hose connecting the device to automatically about as conventional Through the use of the ohringreul to the receiving portion of the valve sealing body or arm it can be coupled to the coupling were the closure , which is a problem , such as leakage due to problems, such as O-rings are separated . ; This invention is formed by a plurality of circumferentially confidentiality to the flexible wall constituted by that which forms a plurality of grooves in a circumferential direction on the receiving portion of the valve body or be coupled to the female coupling in order to solve such a problem, the end Tan may want to keep that features a multi- sealed by walls .