HOSE CONNECTING STRUCTURE OF A FEMALE COUPLING IN AN AUTOMATIC CONNECTING DEVICE OF A HOSE FOR TRANSFERING A HIGH PURITY CHEMICALS

摘要

female couple mounted on the automatic connection of hoses for chemical feed equipment used in the semiconductor manufacturing process of the present invention hose connection structure of the bellows-shaped elastic ring is installed pipe (22 ) between the slide portion (2) and the pipe connection flange 18 of the coupling arm ( 1), and the second divided pipe joint cover fixed to the flange clearance 18 (19 ) afforded even install , within the recesses 28 of the pipe connection flange (18 ) Hoses for pipe connections (27) connected to the pipe connection flange when assembling (18) is horizontally divided into two fixed gap cover ( 19) so as to be movable in and absorbed by the direct impact , and bellows-shaped elastic tube a gap 22 for acting on the assembly hose is also easily be made from the outside as well as the pipe connection (27) for a hose pipe connection (27) so has the effect of preventing the device from being damaged due to impact by .