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PROCESS FOR PREPARING ORGANIC THIN FILM TRANSISTOR WITH SHORT CHANNEL LENGTH USING AFM LITHOGRAPHY

机译:利用AFM光刻技术制备具有短通道长度的有机薄膜晶体管的方法

摘要

The present invention relates to a method of manufacturing an organic thin film transistor , specifically : a) the deposition on the substrate depositing a metal pattern on the gate insulating film; b) forming a micro- channel between the metal pattern AFM (atomic force microscopy) the source electrode and the drain electrode by lithography ; c) depositing an organic active layer between the micro- channel formed between the source electrode and the drain electrode ; Characterized in that it comprises a . The method of manufacturing an organic thin film transistor according to the invention has the advantage that can be simple and manufactured at a low cost exactly the flexible organic display elements can be formed, the channel length .
机译:有机薄膜晶体管的制造方法技术领域本发明涉及一种有机薄膜晶体管的制造方法,具体而言:a)在基板上进行蒸镀,在栅极绝缘膜上蒸镀金属图案的工序。 b)通过光刻在金属图案AFM(原子力显微镜)源电极和漏电极之间形成微通道; c)在源电极和漏电极之间形成的微通道之间沉积有机活性层;特点是它包含一个。根据本发明的有机薄膜晶体管的制造方法具有以下优点:可以简单地并且以低成本制造,确切地说,可以形成柔性有机显示元件,沟道长度。

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