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Flexible All-organic All-solution Processed Thin Film Transistor Array with Ultrashort Channel

机译:具有超短通道的柔性全有机全溶液处理薄膜晶体管阵列

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摘要

Shrinking the device dimension has long been the pursuit of the semiconductor industry to increase the device density and operation speed. In the application of thin film transistors (TFTs), all-organic TFT arrays made by all-solution process are desired for low cost and flexible electronics. One of the greatest challenges is how to achieve ultrashort channel through a cost-effective method. In our study, ultrashort-channel devices are demonstrated by direct inkjet printing conducting polymer as source/drain and gate electrodes without any complicated substrate’s pre-patterning process. By modifying the substrate’s wettability, the conducting polymer’s contact line is pinned during drying process which makes the channel length well-controlled. An organic TFT array of 200 devices with 2 μm channel length is fabricated on flexible substrate through all-solution process. The simple and scalable process to fabricate high resolution organic transistor array offers a low cost approach in the development of flexible and wearable electronics.
机译:缩小器件尺寸一直是半导体工业增加器件密度和操作速度的追求。在薄膜晶体管(TFT)的应用中,通过全溶液工艺制造的全有机TFT阵列对于低成本和柔性电子器件是期望的。最大的挑战之一是如何通过经济高效的方法实现超短信道。在我们的研究中,超短通道器件通过直接喷墨印刷导电聚合物作为源/漏和栅电极而得到证明,而无需任何复杂的基板预构图工艺。通过改变基材的润湿性,可以在干燥过程中固定导电聚合物的接触线,从而可以很好地控制通道长度。通过全溶液工艺在柔性基板上制造了200个器件,其沟道长度为2μm的有机TFT阵列。制造高分辨率有机晶体管阵列的简单且可扩展的工艺为柔性和可穿戴电子产品的开发提供了一种低成本的方法。

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