PROBE NEEDLE STRUCTURE OF PROBE CARD FOR TESTING SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING PROBE NEEDLE

摘要

This invention relates to a probe card needle structure and manufacturing method for a semiconductor inspection to increase the reliability of the measurement data . That is , the present invention is the probe card for testing semiconductor devices force / sense term and the guard line (guard line) to the probe needle (probe needle) tip (tip) formed by implementing to extend to the end , the probe needle of the self- resistance bejae was removed by a parasitic resistance due to a probe card for testing a semiconductor device (test) (probe card), and to enable the extraction of more reliable data .