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METHOD OF PATTERNING CATALYST LAYER FOR SYNTHESIS OF CARBON NANOTUBES AND METHOD OF FABRICATING FIELD EMISSION DEVICE
METHOD OF PATTERNING CATALYST LAYER FOR SYNTHESIS OF CARBON NANOTUBES AND METHOD OF FABRICATING FIELD EMISSION DEVICE
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机译:碳纳米管合成催化剂层的制备方法及制造场发射器件的方法
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摘要
A method of patterning a catalyst layer for synthesis of carbon nanotubes (CNTs) and a method of fabricating a field emission device (FED) using the method, whereby a catalyst layer formed of metal salt having a weak-acid negative ion group is formed on a substrate, a photoresist is formed on the catalyst layer, the photoresist is exposed to a light using a photomask with a predetermined pattern, predetermined regions of the photoresist and the catalyst layer are removed by using a strong base developing solution, and the photoresist which remains on the catalyst layer is removed.
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