This invention relates to the manufacture of various semiconductor bare wafer yield management system, for measuring a semiconductor bare wafer defect inspection Equipment (10) to collect data coming from the equipment connected with the network and a standard data format after conversion by KLA RF loader unit which serves to upload (Loader Part) (100) and; TCP / IP connection to a shared network receive and analyze the data to be uploaded from the loader section 100 by and summary (Summary) and DB of information and draw a map (Map) keep the necessary data to a file, the information given accurate wafer (Wafer) information and statistics server that summarizes the dictionary DB of the information used in the analysis (SPC) unit (Server Part) (200) and acquired from the server by using MES; The server in conjunction with section 200 shall require querying and analysis of maps and charts and reports that output to the client department, etc. (Client Part) characterized by consisting of (300).
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