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kwolcheu wafer loading device

机译:千秋晶圆装载装置

摘要

PURPOSE: A wafer quartz loading apparatus is provided to reduce the space for working and the size by using a telescope principle applied mechanism. CONSTITUTION: A wafer quartz loading apparatus includes a first base(10), a second base(20) spaced apart from the first base, and a third base(30) for loading a wafer quartz(Q) on the second base, and first to fourth pulleys. The first and second pulleys(P1,P2) connected with each other via a first belt(b1) are installed at one side of the second base. The third pulley(P3) connected with the second pulley via a second belt(b2) is installed at the other side of the second base. The fourth pulley(P4) connected with the third pulley via a third belt(b3) is spaced apart from the third pulley at the other side of the second base. The third base has a larger stroke than that of the second base due to the pulleys.
机译:目的:提供一种晶片石英加载设备,以通过使用望远镜原理应用机构来减少工作空间和尺寸。构成:一种晶片石英装载装置,包括第一基座(10),与第一基座间隔开的第二基座(20)和用于将晶片石英(Q)装载在第二基座上的第三基座(30),第一到第四滑轮。经由第一皮带(b1)彼此连接的第一和第二滑轮(P1,P2)安装在第二基座的一侧。经由第二皮带(b2)与第二皮带轮连接的第三皮带轮(P3)安装在第二基座的另一侧。经由第三皮带(b3)与第三皮带轮连接的第四皮带轮(P4)在第二基座的另一侧与第三皮带轮间隔开。由于皮带轮,第三基座的冲程比第二基座的冲程大。

著录项

  • 公开/公告号KR100545819B1

    专利类型

  • 公开/公告日2006-01-24

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20030032265

  • 发明设计人 김명진;황찬영;안승욱;

    申请日2003-05-21

  • 分类号H01L21/68;

  • 国家 KR

  • 入库时间 2022-08-21 21:24:24

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