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FABRICATION OF SELF-ALIGNED REFLECTIVE/PROTECTIVE OVERLAYS ON MAGNETORESISTANCE SENSORS, AND THE SENSORS
FABRICATION OF SELF-ALIGNED REFLECTIVE/PROTECTIVE OVERLAYS ON MAGNETORESISTANCE SENSORS, AND THE SENSORS
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机译:磁阻传感器和传感器上自对准的反射/保护覆盖层的制造
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摘要
in accordance with the present invention, the magnetoresistive (MR) sensor is deposited on the lower layer structure, the free layer screen ( free layer) of a structure , and is produced by using a sensor , and depositing the oxide structure for covering the free layer. Deposition of the metal oxide structure is a buffer layer during the deposition and the step of depositing a buffer layer covering the free layer , the buffer layer and contacting the coated coating layer , and depositing a metal oxide coating layer of the coating layer of metal oxide, the buffer layer and a step of forming a buffer layer metallic oxide .
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