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MICROCONTACT PRINTING DEVICE USING PDMS STAMP
MICROCONTACT PRINTING DEVICE USING PDMS STAMP
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机译:使用PDMS印记的微接触印刷设备
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摘要
The present invention relates to an apparatus for contact printing in a soft lithography process.;A microcontact printing apparatus using an elastomeric stamp according to the present invention includes a frame including a base, and a fixing plate fixed on the base and positioned upwardly away from the base surface, and fixed between the fixing plate and the base surface. A ball screw nut is fastened to a screw shaft to control movement of the micrometer size unit, and a first holder fixed to the ball screw nut and driven together as the ball screw nut moves along the screw shaft. A nanometer disposed between the micro-displacement control unit, the second holder connected to the first holder so as to be liftable with respect to the first holder, and disposed between the first holder and the second holder Nano displacement control unit including a piezo actuator for controlling the movement of the size unit, and the lower side of the second holder Is installed so as to face this way include load measuring unit including a load cell for measuring the load applied to the movement of the micro or nano-displacement control.;Soft Lithography, Elastomers, Microcontact Printing, Stamps
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