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MICROCONTACT PRINTING DEVICE USING PDMS STAMP

机译:使用PDMS印记的微接触印刷设备

摘要

The present invention relates to an apparatus for contact printing in a soft lithography process.;A microcontact printing apparatus using an elastomeric stamp according to the present invention includes a frame including a base, and a fixing plate fixed on the base and positioned upwardly away from the base surface, and fixed between the fixing plate and the base surface. A ball screw nut is fastened to a screw shaft to control movement of the micrometer size unit, and a first holder fixed to the ball screw nut and driven together as the ball screw nut moves along the screw shaft. A nanometer disposed between the micro-displacement control unit, the second holder connected to the first holder so as to be liftable with respect to the first holder, and disposed between the first holder and the second holder Nano displacement control unit including a piezo actuator for controlling the movement of the size unit, and the lower side of the second holder Is installed so as to face this way include load measuring unit including a load cell for measuring the load applied to the movement of the micro or nano-displacement control.;Soft Lithography, Elastomers, Microcontact Printing, Stamps
机译:技术领域本发明涉及一种用于软光刻工艺中的接触印刷的设备。根据本发明的使用弹性体压模的微接触印刷设备包括:框架,其包括基座;以及固定板,其固定在该基座上并远离该基座向上定位。固定在固定板和底面之间。滚珠丝杠螺母被紧固到螺杆轴上以控制千分尺尺寸单元的运动,并且第一保持器固定到滚珠丝杠螺母上并且随着滚珠丝杠螺母沿螺杆轴的移动而被一起驱动。纳米设置在微位移控制单元之间,第二保持器连接到第一保持器,从而相对于第一保持器可提升,并设置在第一保持器和第二保持器之间。纳米位移控制单元包括压电致动器,用于控制尺寸单元的运动,并且以这样的方式安装第二保持器的下侧,包括载荷测量单元,该载荷测量单元包括用于测量施加于微位移或纳米位移控制的运动的载荷的载荷传感器。软光刻,弹性体,微接触印刷,邮票

著录项

  • 公开/公告号KR100623209B1

    专利类型

  • 公开/公告日2006-09-13

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20050002486

  • 发明设计人 조정대;김광영;이응숙;

    申请日2005-01-11

  • 分类号H01L21/027;

  • 国家 KR

  • 入库时间 2022-08-21 21:23:01

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