Functional disk of Scanning Probe Microscope and method for measuring voltage/current between the tip and the sample using functional disk of Scanning Probe Microscope

摘要

The present invention provides a current and a voltage applied in a lithography process using a scanning probe microscope between the probe and the substrate will readily on the functional disc and the measuring method using it, which can be measured. ; The invention of scanning probe microscopy configure the disk with disk upper and lower plates with the disc characteristics that challenge with a combination of upper and lower insulator while having each terminal and an external measurement devices and disk disk tops How to connect to the terminal of the lower plate to measure a voltage or a current which flows between the bias voltage or current is applied when the probe and the substrate, with the insulation while having the center of each terminal for connection to an external measuring device to be combined with the upper and lower side piece It provides functional disks configured as a disk upper and lower plates that challenges the disk properties.